High-cycle Life Testing of Rf Mems Switches (preprint)
نویسندگان
چکیده
RF MEMS capacitive switches capable of orderof-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration leads credence to the mechanical robustness of RF MEMS switches. Index Terms — RF MEMS, reliability, dielectric charging, MEMS switches.
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